Vol. 12, issue 02, article # 14
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Abstract:
Errors of the autocollimation method as applied to measuring a curvature radius of spherical optical surfaces with an interferometer are analyzed. A precision measurement technique (ΔR/R ≈ 10–5) is proposed. It is based on iterative physical refinement of a test piece position by results of interferogram processing. A relation between the measurement error and characteristics of a digital interferometer is obtained.