Vol. 13, issue 03, article # 21
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Abstract:
XeCl (λ ~ 308 nm) and KrCl (λ ~ 222 nm) excilamps excited by the capacitive and a high-frequency glow discharge were studied in order to increase their service life. The reliability of the capacitive discharge excilamps is determined by the mechanism of the heterophase chemical reaction between atomic chlorine and a quartz wall with the formation of polymer chlorinesiloxane products. Sealed-off excilamps with the service life more than 1000 h were created.