Vol. 13, issue 03, article # 20

Abstract:

We have studied experimentally the power and time characteristics of a short-pulse radiation of the discharge plasma. The maximum output pulse power density was obtained from a high-pressure volume discharge formed in a planar excilamp with the UV preionization in the discharge gap. At the mixture pressure of several atmospheres the output power density was 5 kW/cm² at λ ~ 250 nm and 3.5 kW/cm² at λ ~ 222 and 308 nm. In a cylindrical excilamp with the internal electrodes, the pulse power of 75 kW was obtained in the Xe-I2 mixture, and in a similar capacitive discharge KrCl excilamp (λ ~ 222 nm) it was up to 2.5 kW through the lamp end of 10 cm² area. It was shown that the use of a capacitive discharge allows the excilamp service life to be increased.