The dynamic of high power CO2 laser radiation impact on yttrium-aluminum garnet (YAG) and yttrium stabilized zirconium oxide (YSZ) targets has been investigated. The laser pulse had the following parameters: an energy of 1 J, duration of 250μs, a peak power of 7 kW. The investigations were carried out with the help of 3D numerical model, which included the equations of heat conductivity and movement of melt. With the help of our model we have calculated the dynamics of evaporation of target material together with the displacement of the melt under action of overpressure of vapor. These processes result in formation of a crater. The crystallization of melt and redistribution of energy between solid, liquid, and gaseous phases have been also calculated. We have explained the non-stoichiometric evaporation of complex targets. Calculations also explained an evaporation efficiency of 10%, experimentally observed for YAG and YSZ targets.
laser radiation, oxides, nanopowders, target, crater