The comparison of power and spectral characteristics of barrier discharge planar excilamp in binary mixes Kr-Cl2, Xe-Cl2, Xe-Br2, Ar-Cl2, Kr-Br2 is carried out. In a row of XeCl-, XeBr-, KrCl-, KrBr-, Cl2-excilamps, radiant power densities of 39, 30, 19.3, 11.4, and 9.9 mW/cm2 have been obtained. The comparison with coaxial barrier discharge excilamps in optimal (from the point of view of radiant power and uniformity of flask filling with microdischarges) conditions has revealed a low efficiency of planar excilamps. In a planar design the distribution of a light flow was nearly uniform over the output window.
excilamp, UV radiation, barrier discharge, XeCL, XeBr, KrCl, Cl2