Xe excilamps operating with high efficiency in the VUV spectral region are studied. It is shown that a one-barrier excilamp in comparison with a two-barrier one, all other conditions being the same, operates at lower discharge triggering voltages and has higher optimal pressure. For the first time, excilamp operation is demonstrated at pumping by a high-frequency excitation generator without transformer. In this generator we use inductive energy storage and semiconductor opening switch. A pulse repetition rate of 100 kHz is obtained.